FEG HRSEM and Focused Ion Beam, ETD and TLD detectors
DBS/CBIS houses a FEI Helios Dual Beam in S1 Level 2. It has a focused ion beam (Ga) and electron beam (FEG) SEM. It is used for slice-and-view for large volume 3D tomography, up to several hundreds of microns. It bridges the gap between Laser confocal and TEM tomography.